JPH0547472Y2 - - Google Patents

Info

Publication number
JPH0547472Y2
JPH0547472Y2 JP1987113575U JP11357587U JPH0547472Y2 JP H0547472 Y2 JPH0547472 Y2 JP H0547472Y2 JP 1987113575 U JP1987113575 U JP 1987113575U JP 11357587 U JP11357587 U JP 11357587U JP H0547472 Y2 JPH0547472 Y2 JP H0547472Y2
Authority
JP
Japan
Prior art keywords
substrate
side wall
cassette
end surface
opening
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1987113575U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6418743U (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987113575U priority Critical patent/JPH0547472Y2/ja
Publication of JPS6418743U publication Critical patent/JPS6418743U/ja
Application granted granted Critical
Publication of JPH0547472Y2 publication Critical patent/JPH0547472Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Packaging Frangible Articles (AREA)
JP1987113575U 1987-07-24 1987-07-24 Expired - Lifetime JPH0547472Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987113575U JPH0547472Y2 (en]) 1987-07-24 1987-07-24

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987113575U JPH0547472Y2 (en]) 1987-07-24 1987-07-24

Publications (2)

Publication Number Publication Date
JPS6418743U JPS6418743U (en]) 1989-01-30
JPH0547472Y2 true JPH0547472Y2 (en]) 1993-12-14

Family

ID=31353532

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987113575U Expired - Lifetime JPH0547472Y2 (en]) 1987-07-24 1987-07-24

Country Status (1)

Country Link
JP (1) JPH0547472Y2 (en])

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0821612B2 (ja) * 1989-10-18 1996-03-04 淀川化成株式会社 ガラス基板用カセット
JPH10231023A (ja) * 1997-02-24 1998-09-02 Matsushita Electric Ind Co Ltd 基板搬送方法および基板搬送カセット

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6133968A (ja) * 1984-07-11 1986-02-18 株式会社日立製作所 運搬具

Also Published As

Publication number Publication date
JPS6418743U (en]) 1989-01-30

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